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Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology

Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a Lissajous...

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Detalles Bibliográficos
Autores principales: Liu, Fengwei, Kuang, Yu, Wu, Yongqian, Chen, Xiaojun, Zhang, Rongzhu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10279687/
https://www.ncbi.nlm.nih.gov/pubmed/37336928
http://dx.doi.org/10.1038/s41598-023-36584-5