Impact of film thickness in laser-induced periodic structures on amorphous Si films

We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the pe...

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Detalles Bibliográficos
Autores principales: Xu, Liye, Geng, Jiao, Shi, Liping, Cui, Weicheng, Qiu, Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Higher Education Press 2023
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10281936/
https://www.ncbi.nlm.nih.gov/pubmed/37338710
http://dx.doi.org/10.1007/s12200-023-00071-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10281936/
https://www.ncbi.nlm.nih.gov/pubmed/37338710
http://dx.doi.org/10.1007/s12200-023-00071-6

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