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Impact of film thickness in laser-induced periodic structures on amorphous Si films
We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the pe...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Higher Education Press
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10281936/ https://www.ncbi.nlm.nih.gov/pubmed/37338710 http://dx.doi.org/10.1007/s12200-023-00071-6 |