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Thin film design of amorphous hafnium oxide nanocomposites enabling strong interfacial resistive switching uniformity
A design concept of phase-separated amorphous nanocomposite thin films is presented that realizes interfacial resistive switching (RS) in hafnium-oxide-based devices. The films are formed by incorporating an average of 7% Ba into hafnium oxide during pulsed laser deposition at temperatures ≤400°C. T...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Association for the Advancement of Science
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10284547/ https://www.ncbi.nlm.nih.gov/pubmed/37343094 http://dx.doi.org/10.1126/sciadv.adg1946 |