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Boron-Implanted Black Silicon Photodiode with Close-to-Ideal Responsivity from 200 to 1000 nm
[Image: see text] Detection of UV light has traditionally been a major challenge for Si photodiodes due to reflectance losses and junction recombination. Here we overcome these problems by combining a nanostructured surface with an optimized implanted junction and compare the obtained performance to...
Autores principales: | Setälä, Olli E., Chen, Kexun, Pasanen, Toni P., Liu, Xiaolong, Radfar, Behrad, Vähänissi, Ville, Savin, Hele |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10288819/ https://www.ncbi.nlm.nih.gov/pubmed/37363632 http://dx.doi.org/10.1021/acsphotonics.2c01984 |
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