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Effects of β-Si(3)N(4) Seeds on Microstructure and Performance of Si(3)N(4) Ceramics in Semiconductor Package
Among the various ceramic substrate materials, Si(3)N(4) ceramics have demonstrated high thermal conductivity, good thermal shock resistance, and excellent corrosion resistance. As a result, they are well-suited for semiconductor substrates in high-power and harsh conditions encountered in automobil...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302068/ https://www.ncbi.nlm.nih.gov/pubmed/37374644 http://dx.doi.org/10.3390/ma16124461 |