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Effects of β-Si(3)N(4) Seeds on Microstructure and Performance of Si(3)N(4) Ceramics in Semiconductor Package

Among the various ceramic substrate materials, Si(3)N(4) ceramics have demonstrated high thermal conductivity, good thermal shock resistance, and excellent corrosion resistance. As a result, they are well-suited for semiconductor substrates in high-power and harsh conditions encountered in automobil...

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Detalles Bibliográficos
Autores principales:	Shen, Qiang, Lin, Zhijie, Deng, Junjie, Chen, Hongxiang, Chen, Xuan, Tian, Jun, Bao, Biliang, Dai, Pinqiang, Sun, Xudong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302068/ https://www.ncbi.nlm.nih.gov/pubmed/37374644 http://dx.doi.org/10.3390/ma16124461

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