Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD

This study identified time-varying harmonic characteristics in a high-density plasma (HDP) chemical vapor deposition (CVD) chamber by depositing low-k oxide (SiOF). The characteristics of harmonics are caused by the nonlinear Lorentz force and the nonlinear nature of the sheath. In this study, a non...

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Detalles Bibliográficos
Autores principales: Park, Yonggyun, Liu, Pengzhan, Lee, Seunghwan, Cho, Jinill, Joo, Eric, Kim, Hyeong-U, Kim, Taesung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302176/
https://www.ncbi.nlm.nih.gov/pubmed/37420730
http://dx.doi.org/10.3390/s23125563

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302176/
https://www.ncbi.nlm.nih.gov/pubmed/37420730
http://dx.doi.org/10.3390/s23125563

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