A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators

This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and i...

Descripción completa

Detalles Bibliográficos
Autores principales: Feng, Tianren, Yu, Duli, Wu, Bo, Wang, Hui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302343/
https://www.ncbi.nlm.nih.gov/pubmed/37374808
http://dx.doi.org/10.3390/mi14061222

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302343/
https://www.ncbi.nlm.nih.gov/pubmed/37374808
http://dx.doi.org/10.3390/mi14061222

Ejemplares similares