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A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators
This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and i...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302343/ https://www.ncbi.nlm.nih.gov/pubmed/37374808 http://dx.doi.org/10.3390/mi14061222 |