A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

This paper presents a new metal-contact RF MEMS switch based on an Al-Sc alloy. The use of an Al-Sc alloy is intended to replace the traditional Au-Au contact, which can greatly improve the hardness of the contact, and thus improve the reliability of the switch. The multi-layer stack structure is ad...

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Detalles Bibliográficos
Autores principales: Hou, Zhongxuan, Zhang, Yongkang, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Lu, Xiaorui, Liu, Jiahui, Ning, Jin, Wei, Tongbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302526/
https://www.ncbi.nlm.nih.gov/pubmed/37374683
http://dx.doi.org/10.3390/mi14061098

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302526/
https://www.ncbi.nlm.nih.gov/pubmed/37374683
http://dx.doi.org/10.3390/mi14061098

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