A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

This paper presents a new metal-contact RF MEMS switch based on an Al-Sc alloy. The use of an Al-Sc alloy is intended to replace the traditional Au-Au contact, which can greatly improve the hardness of the contact, and thus improve the reliability of the switch. The multi-layer stack structure is ad...

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Detalles Bibliográficos
Autores principales: Hou, Zhongxuan, Zhang, Yongkang, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Lu, Xiaorui, Liu, Jiahui, Ning, Jin, Wei, Tongbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302526/
https://www.ncbi.nlm.nih.gov/pubmed/37374683
http://dx.doi.org/10.3390/mi14061098
Descripción
Sumario:This paper presents a new metal-contact RF MEMS switch based on an Al-Sc alloy. The use of an Al-Sc alloy is intended to replace the traditional Au-Au contact, which can greatly improve the hardness of the contact, and thus improve the reliability of the switch. The multi-layer stack structure is adopted to achieve the low switch line resistance and hard contact surface. The polyimide sacrificial layer process is developed and optimized, and the RF switches are fabricated and tested for pull-in voltage, S-parameters, and switching time. The switch shows high isolation of more than 24 dB and a low insertion loss of less than 0.9 dB in the frequency range of 0.1–6 GHz.

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