A Study on the Material Removal Characteristics and Damage Mechanism of Lapping for Pressureless Sintered Silicon Carbide (SSiC) Microlens Cavity

Microlens arrays have been widely employed to control the reflection, refraction, and diffraction characteristics of light due to its distinctive surface properties. Precision glass molding (PGM) is the primary method for the mass production of microlens arrays, of which pressureless sintered silico...

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Detalles Bibliográficos
Autores principales: Zhou, Tianfeng, Li, Zhongyi, Guo, Weijia, Liu, Peng, Zhao, Bin, Wang, Xibin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303583/
https://www.ncbi.nlm.nih.gov/pubmed/37374747
http://dx.doi.org/10.3390/mi14061162

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303583/
https://www.ncbi.nlm.nih.gov/pubmed/37374747
http://dx.doi.org/10.3390/mi14061162

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