A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2 kHz bandwidth for particle acceleration detection applications. The low noise of the accelerometer is achieved through a combination of device design optimization and operation under vacuum to reduce the effects...

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Detalles Bibliográficos
Autores principales: Ahmed, Zayed, Duruaku, Charles, Edalatfar, Fatemeh, Moallem, Mehrdad, Bahreyni, Behraad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303965/
https://www.ncbi.nlm.nih.gov/pubmed/37374773
http://dx.doi.org/10.3390/mi14061188

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303965/
https://www.ncbi.nlm.nih.gov/pubmed/37374773
http://dx.doi.org/10.3390/mi14061188

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