Cargando…

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2 kHz bandwidth for particle acceleration detection applications. The low noise of the accelerometer is achieved through a combination of device design optimization and operation under vacuum to reduce the effects...

Descripción completa

Detalles Bibliográficos
Autores principales:	Ahmed, Zayed, Duruaku, Charles, Edalatfar, Fatemeh, Moallem, Mehrdad, Bahreyni, Behraad
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303965/ https://www.ncbi.nlm.nih.gov/pubmed/37374773 http://dx.doi.org/10.3390/mi14061188

Ejemplares similares

Micromachined Resonators: A Review
por: Abdolvand, Reza, et al.
Publicado: (2016)

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers
por: Yin, Yonggang, et al.
Publicado: (2019)

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review
por: Wang, Chen, et al.
Publicado: (2020)

A Random Error Suppression Method Based on IGWPSO-ELM for Micromachined Silicon Resonant Accelerometers
por: Wang, Peng, et al.
Publicado: (2023)

A Robust Angular Rate Sensor Utilizing 2:1 Auto-Parametric Resonance Excitation
por: Gadhavi, Bhargav, et al.
Publicado: (2022)

Utilization of 2:1 Internal Resonance in Microsystems
por: Noori, Navid, et al.
Publicado: (2018)

Reconfigurable multi-component micromachines driven by optoelectronic tweezers
por: Zhang, Shuailong, et al.
Publicado: (2021)

A Nonlinear Rate Microsensor utilising Internal Resonance
por: Sarrafan, Atabak, et al.
Publicado: (2019)

Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
por: Huang, Libin, et al.
Publicado: (2021)

Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer
por: Zhou, Wu, et al.
Publicado: (2013)

A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes
por: Liang, Tian, et al.
Publicado: (2022)

Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes
por: Chen, Yun-Ting, et al.
Publicado: (2018)

Temperature Compensation Method Based on an Improved Firefly Algorithm Optimized Backpropagation Neural Network for Micromachined Silicon Resonant Accelerometers
por: Huang, Libin, et al.
Publicado: (2022)

Localized Mechanical Actuation using pn Junctions
por: Kanygin, Mikhail, et al.
Publicado: (2019)

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances
por: Shen, Qiang, et al.
Publicado: (2019)

Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
por: Cui, Feng, et al.
Publicado: (2011)

Design of a Micromachined Z-axis Tunneling Magnetoresistive Accelerometer with Electrostatic Force Feedback
por: Yang, Bo, et al.
Publicado: (2019)

A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect
por: Yang, Bo, et al.
Publicado: (2020)

Reconfigurable Architectures with High-Frequency Noise Suppression for Wearable ECG Devices
por: Joseph Michael Jerard, V., et al.
Publicado: (2021)

Micromachined Resonant Frequency Tuning Unit for Torsional Resonator
por: Lee, Jae-Ik, et al.
Publicado: (2017)

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer
por: Yin, Yonggang, et al.
Publicado: (2016)

Rapid Detection of Viable Microorganisms Based on a Plate Count Technique Using Arrayed Microelectrodes
por: Bajwa, Avneet, et al.
Publicado: (2013)

Capacitive Based Micromachined Resonators for Low Level Mass Detection
por: Nathani, Muhammad Umair, et al.
Publicado: (2020)

Micromachining
Publicado: (1995)

A Hybrid Algorithm for Noise Suppression of MEMS Accelerometer Based on the Improved VMD and TFPF
por: Zhou, Yongjun, et al.
Publicado: (2022)

Investigation on the Electrochemical Micromachining of Micro Through-Hole by Using Micro Helical Electrode
por: Liu, Baohui, et al.
Publicado: (2020)

Multilayer Dielectric Elastomer with Reconfigurable Electrodes for Artificial Muscle
por: Fu, Hongbo, et al.
Publicado: (2023)

Microrobots in Micromachines
por: Fortuna, Luigi, et al.
Publicado: (2022)

Micromachining on and of Transparent Polymers for Patterning Electrodes and Growing Electrically Active Cells for Biosensor Applications
por: Karnati, Chandana, et al.
Publicado: (2017)

Experimental Study on the Influence of Tool Electrode Material on Electrochemical Micromachining of 304 Stainless Steel
por: Bian, Jianxiao, et al.
Publicado: (2021)

Unsupervised Noise Reductions for Gravitational Reference Sensors or Accelerometers Based on the Noise2Noise Method
por: Yang, Zhilan, et al.
Publicado: (2023)

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
por: Gong, Xuewen, et al.
Publicado: (2023)

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers
por: Royo, Guillermo, et al.
Publicado: (2016)

A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
por: Ren, Sen, et al.
Publicado: (2013)

A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers
por: Qi, Min, et al.
Publicado: (2019)

Micromachines for Microplastics Treatment
por: Hermanová, Soňa, et al.
Publicado: (2022)

Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme
por: Liu, Yu-Sian, et al.
Publicado: (2018)

Micromachining with Nanostructured Cutting Tools
por: Jackson, Mark J
Publicado: (2013)

Distance effects in electrochemical micromachining
por: Xu, Lizhong, et al.
Publicado: (2016)

Acknowledgement to Reviewers of Micromachines in 2016
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_id9i44i6g7ch9ui0svqecverb7