Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers

The high-order mechanical resonances of the sensing element in a high-vacuum environment can significantly degrade the noise and distortion performance of seismic-grade sigma–delta MEMS capacitive accelerometers. However, the current modeling approach is unable to evaluate the effects of high-order...

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Detalles Bibliográficos
Autores principales: Wang, Xuefeng, Zhang, Penghao, Ding, Shijin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10305370/
https://www.ncbi.nlm.nih.gov/pubmed/37420559
http://dx.doi.org/10.3390/s23125394

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10305370/
https://www.ncbi.nlm.nih.gov/pubmed/37420559
http://dx.doi.org/10.3390/s23125394

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