Cargando…
Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers
The high-order mechanical resonances of the sensing element in a high-vacuum environment can significantly degrade the noise and distortion performance of seismic-grade sigma–delta MEMS capacitive accelerometers. However, the current modeling approach is unable to evaluate the effects of high-order...
| Autores principales: | , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10305370/ https://www.ncbi.nlm.nih.gov/pubmed/37420559 http://dx.doi.org/10.3390/s23125394 |