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Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method
MEMS suspended inductors are susceptible to deformation under external forces, which can lead to the degradation of their electrical properties. The mechanical response of the inductor to a shock load is usually solved by a numerical method, such as the finite element method (FEM). In this paper, th...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10305409/ https://www.ncbi.nlm.nih.gov/pubmed/37374772 http://dx.doi.org/10.3390/mi14061187 |