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Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi be...

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Detalles Bibliográficos
Autores principales: Li, Jiaqun, Yan, Jianfeng, Jiang, Lan, Yu, Jiachen, Guo, Heng, Qu, Liangti
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10317996/
https://www.ncbi.nlm.nih.gov/pubmed/37400434
http://dx.doi.org/10.1038/s41377-023-01178-3