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Nanoscale multi-beam lithography of photonic crystals with ultrafast laser
Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi be...
Autores principales: | Li, Jiaqun, Yan, Jianfeng, Jiang, Lan, Yu, Jiachen, Guo, Heng, Qu, Liangti |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10317996/ https://www.ncbi.nlm.nih.gov/pubmed/37400434 http://dx.doi.org/10.1038/s41377-023-01178-3 |
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