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Protocol for preparing layer-engineered van der Waals materials through atomic spalling
Here, we present a protocol for preparing layer-engineered van der Waals (vdW) materials via an atomic spalling process. We describe steps for fixing bulk crystals and introduce the appropriate stressor materials. We then detail a deposition technique for internal stress regulation of stressor film,...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10323014/ https://www.ncbi.nlm.nih.gov/pubmed/37071528 http://dx.doi.org/10.1016/j.xpro.2023.102228 |