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Amorphous/Nanocrystalline High-Entropy CoCrFeNiTi(x) Thin Films with Low Thermal Coefficient of Resistivity Obtained via Magnetron Deposition

High-entropy alloys are promising materials for novel thin-film resistors since they have high resistivity and a low-temperature coefficient of resistivity (TCR). In this work, a new high-entropy thin-film CoCrFeNiTi(x) was deposited on a Si/SiO(2) substrate by means of magnetron sputtering of the m...

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Detalles Bibliográficos
Autores principales: Poliakov, Maksim, Kovalev, Dmitry, Vadchenko, Sergei, Moskovskikh, Dmitry, Kiryukhantsev-Korneev, Philipp, Volkova, Lidiya, Dudin, Alexander, Orlov, Andrey, Goryachev, Andrey, Rogachev, Alexander
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10343313/
https://www.ncbi.nlm.nih.gov/pubmed/37446519
http://dx.doi.org/10.3390/nano13132004