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Amorphous/Nanocrystalline High-Entropy CoCrFeNiTi(x) Thin Films with Low Thermal Coefficient of Resistivity Obtained via Magnetron Deposition
High-entropy alloys are promising materials for novel thin-film resistors since they have high resistivity and a low-temperature coefficient of resistivity (TCR). In this work, a new high-entropy thin-film CoCrFeNiTi(x) was deposited on a Si/SiO(2) substrate by means of magnetron sputtering of the m...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10343313/ https://www.ncbi.nlm.nih.gov/pubmed/37446519 http://dx.doi.org/10.3390/nano13132004 |