Fabrication and Performance of a Ta(2)O(5) Thin Film pH Sensor Manufactured Using MEMS Processes

In this work, a capacitive pH sensor consisting of Ta(2)O(5) functional film is designed and fabricated by employing MEMS-based procedures. The Ta(2)O(5) thin film has an amorphous microstructure, and its surface roughness is less than 3.17 nm. A signal processing circuit and a software filtering al...

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Detalles Bibliográficos
Autores principales: Guo, Yuzhen, Zhang, Zengxing, Yao, Bin, Chai, Jin, Zhang, Shiqiang, Liu, Jianwei, Zhao, Zhou, Xue, Chenyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346533/
https://www.ncbi.nlm.nih.gov/pubmed/37447910
http://dx.doi.org/10.3390/s23136061

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346533/
https://www.ncbi.nlm.nih.gov/pubmed/37447910
http://dx.doi.org/10.3390/s23136061

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