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Fabrication and Performance of a Ta(2)O(5) Thin Film pH Sensor Manufactured Using MEMS Processes
In this work, a capacitive pH sensor consisting of Ta(2)O(5) functional film is designed and fabricated by employing MEMS-based procedures. The Ta(2)O(5) thin film has an amorphous microstructure, and its surface roughness is less than 3.17 nm. A signal processing circuit and a software filtering al...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346533/ https://www.ncbi.nlm.nih.gov/pubmed/37447910 http://dx.doi.org/10.3390/s23136061 |