Node-Loss Detection Methods for CZ Silicon Single Crystal Based on Multimodal Data Fusion

Monocrystalline silicon is an important raw material in the semiconductor and photovoltaic industries. In the Czochralski (CZ) method of growing monocrystalline silicon, various factors may cause node loss and lead to the failure of crystal growth. Currently, there is no efficient method to detect t...

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Detalles Bibliográficos
Autores principales: Jiang, Lei, Xue, Rui, Liu, Ding
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346705/
https://www.ncbi.nlm.nih.gov/pubmed/37447705
http://dx.doi.org/10.3390/s23135855

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346705/
https://www.ncbi.nlm.nih.gov/pubmed/37447705
http://dx.doi.org/10.3390/s23135855

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