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Node-Loss Detection Methods for CZ Silicon Single Crystal Based on Multimodal Data Fusion
Monocrystalline silicon is an important raw material in the semiconductor and photovoltaic industries. In the Czochralski (CZ) method of growing monocrystalline silicon, various factors may cause node loss and lead to the failure of crystal growth. Currently, there is no efficient method to detect t...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346705/ https://www.ncbi.nlm.nih.gov/pubmed/37447705 http://dx.doi.org/10.3390/s23135855 |