MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition

We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated...

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Detalles Bibliográficos
Autores principales: Cao, Zhi, Jia, Hao, Zhou, Yufan, Li, Ming, Xu, Pengcheng, Li, Xinxin, Zheng, Dan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10347078/
https://www.ncbi.nlm.nih.gov/pubmed/37447995
http://dx.doi.org/10.3390/s23136147

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10347078/
https://www.ncbi.nlm.nih.gov/pubmed/37447995
http://dx.doi.org/10.3390/s23136147

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