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MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition
We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated...
Autores principales: | Cao, Zhi, Jia, Hao, Zhou, Yufan, Li, Ming, Xu, Pengcheng, Li, Xinxin, Zheng, Dan |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10347078/ https://www.ncbi.nlm.nih.gov/pubmed/37447995 http://dx.doi.org/10.3390/s23136147 |
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