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Thin-film PMUTs: a review of over 40 years of research

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the pri...

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Detalles Bibliográficos
Autores principales: Roy, Kaustav, Lee, Joshua En-Yuan, Lee, Chengkuo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10359338/
https://www.ncbi.nlm.nih.gov/pubmed/37484500
http://dx.doi.org/10.1038/s41378-023-00555-7