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Thin-film PMUTs: a review of over 40 years of research
Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the pri...
Autores principales: | Roy, Kaustav, Lee, Joshua En-Yuan, Lee, Chengkuo |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10359338/ https://www.ncbi.nlm.nih.gov/pubmed/37484500 http://dx.doi.org/10.1038/s41378-023-00555-7 |
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