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Characterization of thin film Parylene C device curvature and the formation of helices via thermoforming

In microfabricated biomedical devices, flexible, polymer substrates are becoming increasingly preferred over rigid, silicon substrates because of their ability to conform to biological tissue. Such devices, however, are fabricated in a planar configuration, which results in planar devices that do no...

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Detalles Bibliográficos
Autores principales: Thielen, Brianna, Meng, Ellis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: IOP Publishing 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10373221/
https://www.ncbi.nlm.nih.gov/pubmed/37520061
http://dx.doi.org/10.1088/1361-6439/acdc33