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Characterization of thin film Parylene C device curvature and the formation of helices via thermoforming
In microfabricated biomedical devices, flexible, polymer substrates are becoming increasingly preferred over rigid, silicon substrates because of their ability to conform to biological tissue. Such devices, however, are fabricated in a planar configuration, which results in planar devices that do no...
Autores principales: | Thielen, Brianna, Meng, Ellis |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
IOP Publishing
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10373221/ https://www.ncbi.nlm.nih.gov/pubmed/37520061 http://dx.doi.org/10.1088/1361-6439/acdc33 |
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