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X-Intersected Silicon Modulator of Well-Rounded Performance

In silicon modulator design, implantation is always a key factor, significantly influencing the doping profile and carrier distribution. As waveguide doping is limited by the compact footprint of the modulator rib, three-dimensional complex optimization is a viable option to improve performance. Thi...

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Detalles Bibliográficos
Autores principales: Zhu, Zijian, Zhao, Yingxuan, Sheng, Zhen, Gan, Fuwan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10383756/
https://www.ncbi.nlm.nih.gov/pubmed/37512746
http://dx.doi.org/10.3390/mi14071435