Research on the Application of Microcast Electromagnetic Coil in an Si MEMS Bistable Recoverable Safety and Arming Device

A low-driving energy and bistable recoverable MEMS safety and arming device (S&A), based on microcasting technology and deep silicon etching technology, is proposed to meet safety system requirements. A force–electromagnetic combination solution is constructed for the Si MEMS S&A, with param...

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Detalles Bibliográficos
Autores principales: Lv, Sining, Feng, Hengzhen, Lou, Wenzhong, Xiao, Chuan, Su, Wenting, Kan, Wenxing, He, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384045/
https://www.ncbi.nlm.nih.gov/pubmed/37512656
http://dx.doi.org/10.3390/mi14071346

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384045/
https://www.ncbi.nlm.nih.gov/pubmed/37512656
http://dx.doi.org/10.3390/mi14071346

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