Contribution of Ribbon-Structured SiO(2) Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators

New designs based on S(0) Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO(2), are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) co...

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Detalles Bibliográficos
Autores principales: Moutaouekkil, Mohammed, Streque, Jérémy, Marbouh, Othmane, El Boudouti, El Houssaine, Elmazria, Omar, Pernod, Philippe, Bou Matar, Olivier, Talbi, Abdelkrim
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384411/
https://www.ncbi.nlm.nih.gov/pubmed/37514579
http://dx.doi.org/10.3390/s23146284

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384411/
https://www.ncbi.nlm.nih.gov/pubmed/37514579
http://dx.doi.org/10.3390/s23146284

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