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Contribution of Ribbon-Structured SiO(2) Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators
New designs based on S(0) Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO(2), are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) co...
Autores principales: | Moutaouekkil, Mohammed, Streque, Jérémy, Marbouh, Othmane, El Boudouti, El Houssaine, Elmazria, Omar, Pernod, Philippe, Bou Matar, Olivier, Talbi, Abdelkrim |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384411/ https://www.ncbi.nlm.nih.gov/pubmed/37514579 http://dx.doi.org/10.3390/s23146284 |
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