Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material

Micro- and nanopatterns perform unique functions and have attracted attention in various industrial fields, such as electronic devices, microfluidics, biotechnology, optics, sensors, and smart and anti-adhesion surfaces. To put fine-patterned products to practical use, low-cost patterning technology...

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Detalles Bibliográficos
Autores principales: Unno, Noriyuki, Mäkelä, Tapio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385880/
https://www.ncbi.nlm.nih.gov/pubmed/37513042
http://dx.doi.org/10.3390/nano13142031

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385880/
https://www.ncbi.nlm.nih.gov/pubmed/37513042
http://dx.doi.org/10.3390/nano13142031

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