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Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material
Micro- and nanopatterns perform unique functions and have attracted attention in various industrial fields, such as electronic devices, microfluidics, biotechnology, optics, sensors, and smart and anti-adhesion surfaces. To put fine-patterned products to practical use, low-cost patterning technology...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385880/ https://www.ncbi.nlm.nih.gov/pubmed/37513042 http://dx.doi.org/10.3390/nano13142031 |