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The WC and CrC Coatings Deposited from Carbonyls Using PE CVD Method—Structure and Properties
This article presents a comparative study of WC and CrC coatings deposited by the plasma-enhanced chemical vapor method using the hexacarbonyls of W and Cr as precursors. The measured thicknesses of the WC and CrC coatings are equal to ca. 1.5 µm. The WC coating consists of microcolumns with a conic...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385987/ https://www.ncbi.nlm.nih.gov/pubmed/37512319 http://dx.doi.org/10.3390/ma16145044 |