Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the...

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Detalles Bibliográficos
Autores principales: Chen, Wenqing, Jin, Li, Wang, Zhibin, Peng, Haifeng, Li, Mengwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10386268/
https://www.ncbi.nlm.nih.gov/pubmed/37512612
http://dx.doi.org/10.3390/mi14071301

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10386268/
https://www.ncbi.nlm.nih.gov/pubmed/37512612
http://dx.doi.org/10.3390/mi14071301

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