Effects of Film Thickness on the Residual Stress of Vanadium Dioxide Thin Films Grown by Magnetron Sputtering

Vanadium dioxide (VO(2)) thin films of different thicknesses were prepared by regulating the deposition time (2, 2.5, 3, and 3.5 h). The impact of deposition time on the microstructure, surface morphology, and cross-section morphology was investigated. The results showed that the grain size increase...

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Detalles Bibliográficos
Autores principales: Wang, Yuemin, Li, Xingang, Yan, Xiangqiao, Dou, Shuliang, Li, Yao, Wang, Lei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10386697/
https://www.ncbi.nlm.nih.gov/pubmed/37512365
http://dx.doi.org/10.3390/ma16145093

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10386697/
https://www.ncbi.nlm.nih.gov/pubmed/37512365
http://dx.doi.org/10.3390/ma16145093

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