Interface State Density Prediction between an Insulator and a Semiconductor by Gaussian Process Regression Models for a Modified Process

[Image: see text] During data-driven process condition optimization on a laboratory scale, only a small-size data set is accessible and should be effectively utilized. On the other hand, during process development, new operations are frequently inserted or current operations are modified. These acce...

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Detalles Bibliográficos
Autores principales: Matsunaga, Kanta, Harada, Takuto, Harada, Shintaro, Sato, Akinori, Terai, Shota, Uenuma, Mutsunori, Miyao, Tomoyuki, Uraoka, Yukiharu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10398861/
https://www.ncbi.nlm.nih.gov/pubmed/37546629
http://dx.doi.org/10.1021/acsomega.3c02980

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10398861/
https://www.ncbi.nlm.nih.gov/pubmed/37546629
http://dx.doi.org/10.1021/acsomega.3c02980

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