Interface State Density Prediction between an Insulator and a Semiconductor by Gaussian Process Regression Models for a Modified Process

[Image: see text] During data-driven process condition optimization on a laboratory scale, only a small-size data set is accessible and should be effectively utilized. On the other hand, during process development, new operations are frequently inserted or current operations are modified. These acce...

Descripción completa

Detalles Bibliográficos
Autores principales: Matsunaga, Kanta, Harada, Takuto, Harada, Shintaro, Sato, Akinori, Terai, Shota, Uenuma, Mutsunori, Miyao, Tomoyuki, Uraoka, Yukiharu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10398861/
https://www.ncbi.nlm.nih.gov/pubmed/37546629
http://dx.doi.org/10.1021/acsomega.3c02980

Ejemplares similares

Ejemplares similares