Research on the Dynamic Characteristics of Perfluoroalkoxy Alkane Springs

Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. H...

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Detalles Bibliográficos
Autores principales: Ni, Jing, Feng, Yujie, Cui, Zhi, He, Lihua, Sun, Jingbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10419631/
https://www.ncbi.nlm.nih.gov/pubmed/37569995
http://dx.doi.org/10.3390/ma16155289

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10419631/
https://www.ncbi.nlm.nih.gov/pubmed/37569995
http://dx.doi.org/10.3390/ma16155289

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