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Research on the Dynamic Characteristics of Perfluoroalkoxy Alkane Springs
Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. H...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10419631/ https://www.ncbi.nlm.nih.gov/pubmed/37569995 http://dx.doi.org/10.3390/ma16155289 |