Mass Spectra Fitting as Diagnostic Tool for Magnetron Plasmas Generated in Ar and Ar/H(2) Gases with Tungsten Targets

In this work, we describe an ion mass spectra processing method from plasmas generated in Ar and Ar/H(2) gases in contact with tungsten surfaces. For this purpose, advanced model functions, i.e., those suitable for fitting the experimental mass peak profiles, are used. In addition, the peak position...

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Detalles Bibliográficos
Autores principales: Craciun, Cristina, Stoica, Silviu Daniel, Mitu, Bogdana Maria, Acsente, Tomy, Dinescu, Gheorghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10420293/
https://www.ncbi.nlm.nih.gov/pubmed/37570638
http://dx.doi.org/10.3390/molecules28155664

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10420293/
https://www.ncbi.nlm.nih.gov/pubmed/37570638
http://dx.doi.org/10.3390/molecules28155664

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