Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition

Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID). However, such an approach is unsuitable if the sample under study is sensitive to the somewhat aggressiv...

Descripción completa

Detalles Bibliográficos
Autores principales: Orús, Pablo, Sigloch, Fabian, Sangiao, Soraya, De Teresa, José María
Formato: Online Artículo Texto
Lenguaje:English
Publicado: F1000 Research Limited 2022
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10446045/
https://www.ncbi.nlm.nih.gov/pubmed/37645310
http://dx.doi.org/10.12688/openreseurope.15000.1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10446045/
https://www.ncbi.nlm.nih.gov/pubmed/37645310
http://dx.doi.org/10.12688/openreseurope.15000.1

Ejemplares similares