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Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition
Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID). However, such an approach is unsuitable if the sample under study is sensitive to the somewhat aggressiv...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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F1000 Research Limited
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10446045/ https://www.ncbi.nlm.nih.gov/pubmed/37645310 http://dx.doi.org/10.12688/openreseurope.15000.1 |