Structural, Optical, and Electrical Properties of Hafnium–Aluminum–Zinc-Oxide Films Grown by Atomic Layer Deposition for TCO Applications

[Image: see text] ZnO is a widely studied material that exhibits versatile doping possibilities. Most research presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study, hafnium–aluminum codoped zinc oxide (HAZO) thin films were grown on a glass substrate using the a...

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Detalles Bibliográficos
Autores principales: Krajewski, Maciej, Tokarczyk, Mateusz, Świętochowski, Piotr, Wróbel, Piotr, Kamińska, Maria, Drabińska, Aneta
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10448667/
https://www.ncbi.nlm.nih.gov/pubmed/37636974
http://dx.doi.org/10.1021/acsomega.3c04256

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10448667/
https://www.ncbi.nlm.nih.gov/pubmed/37636974
http://dx.doi.org/10.1021/acsomega.3c04256

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