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Structural, Optical, and Electrical Properties of Hafnium–Aluminum–Zinc-Oxide Films Grown by Atomic Layer Deposition for TCO Applications
[Image: see text] ZnO is a widely studied material that exhibits versatile doping possibilities. Most research presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study, hafnium–aluminum codoped zinc oxide (HAZO) thin films were grown on a glass substrate using the a...
Autores principales: | Krajewski, Maciej, Tokarczyk, Mateusz, Świętochowski, Piotr, Wróbel, Piotr, Kamińska, Maria, Drabińska, Aneta |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10448667/ https://www.ncbi.nlm.nih.gov/pubmed/37636974 http://dx.doi.org/10.1021/acsomega.3c04256 |
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